Call us today @ +65 6368 3060

SEMICON OVERVIEW

Wafer Handler

Aligner

Controller

Armset

AMAT

MKS

SMC

FUJI

NOR-CAL

KEY

POSI-FLATE

CVD and Dry Etch parts (Bare Aluminum, Anodized, Ceramic PK Kits, Quartz) Cleaning, Refurbishment and Re-anodizing services.

200mm, 300mm, 150mm, 125mm

Equipment Improvement

Real-time monitoring using data acquisition, and data logging solution, codename AiDAQ

ROBOTICS

PRESSURE VALVES

PARTS CLEANING

CONTINUOUS IMPROVEMENT PROJECT (CIP)

CRYO PUMP

Models of Cryopump Repair

IMPLANT                        PVD

1) OBIS-250                      1) OBIS-8F

2) OBIS-320

New Parts and Parts Related Services

- 2nd Source Aluminum Parts:

- CVD and Dry Etch parts (Bare Aluminum, Anodized, Ceramic PK Kits, Quartz) Cleaning, Refurbishment and Re-anodizing services.

Overhaul and Repair Services

- HP/HP+, P5000,Optima, VHP, MIRRA robots & arm-sets overhauling

- Throttle valves (AMAT, MKS, Millipore etc) repairing & overhauling

- VAT slit valve actuators, ISO valves, Gate Valves, Heater filters, Indexer motors repair

- PRI Equipe/Brooks Automation Atmospheric and Vacuum robots repair or overhaul, e.g. ABM/ATM 1 to 4 Series, MAG7, MTR 5, ATR 8 & etc.

 PRE2xx & 3xx Pre-aligners

- Asyst, Cybeq, Canon 1 series robots and components repair

- System online robots functional and performance analysis

- CMP Mirra Polishing heads and Pad motors overhaul

- AMAT DPS Etch DTCU Cooling units and Throttle valves overhaul

Equipment Improvement 

Real-time monitoring using data acquisition, and data logging solution, codename AiDAQ

We have successfully tested and commissioned a real-time monitoring solution using direct data acquisition from connection of up to 32 channels. With a sampling speed of up to 250KS/s, our system is customizable to suit your needs, and is able to store a minimum of 24 months worth of data, all housed within an industrial compact PC! We are also able to connect this solution to existing servers using Secs to Host Protocol. Fully installed, this system will benefit customers who are interested in early intervention of potential faults and issues, triggering actions to reduce down time to equipment and production line. Contact us for more information

VAC

HVA

VAT

HVA

VAT

A&N CORPORATION